ta-C涂层
Trend of Carbon based (DLC) Coating
FCVA 方式 (Filtered Catodic Vacuum Arc)
特性
LAMSIS is the filtered laser arc system for mass production of hydrogen free DLC(ta-C, a-C) coatings
Better surface roughness can be achieved with a bent duct and electromagnetic filtering
Suitable for mass production with scale-up to higher coating height and faster deposition rate
[ Features ]
Effective zone : Φ800 x max. H600~800mm
Thickness : 1~6um
Hardness : 15~60GPa depending on applications
Deposition rate : 0.3um/hH600 in double rotation with one laser